Pushing the limit of metal-oxide nanowire chemical sensing: selective detection of NO2 down to ppb levels

Daihua Zhang; Chao Li; Zuqin Liu; Tao Tang; Bo Lei; Chongwu Zhou

doi:10.1117/12.571592

29 December 2004 Pushing the limit of metal-oxide nanowire chemical sensing: selective detection of NO₂ down to ppb levels

Daihua Zhang, Chao Li, Zuqin Liu, Tao Tang, Bo Lei, Chongwu Zhou

Author Affiliations +

Proceedings Volume 5593, Nanosensing: Materials and Devices; (2004) https://doi.org/10.1117/12.571592
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

We demonstrate detection of NO₂ down to ppb levels using transistors based on both single and multiple In₂O₃ nanowires operating at room temperature. This represents orders-of-magnitude improvement over previously reported metal oxide film or nanowire/nanobelt sensors. A comparison between the single and multiple nanowire sensors reveals that the latter have numerous advantages in terms of great reliability, high sensitivity and simplicity in fabrication. Furthermore, selective detection of NO₂ can be readily achieved with multiple-nanowire sensors even with other common chemicals such as NH₃, O₂, CO and H₂ around.

Citation Download Citation

Daihua Zhang, Chao Li, Zuqin Liu, Tao Tang, Bo Lei, and Chongwu Zhou "Pushing the limit of metal-oxide nanowire chemical sensing: selective detection of NO₂ down to ppb levels", Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); https://doi.org/10.1117/12.571592

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