Grating Efficiency Measurement And Automated Scatter Inspection System (GEMASIS)

R. A. House; R . D. Petty; J. J. Johnston; B. R. Key; G. J. Denton

doi:10.1117/12.949615

10 May 1986 Grating Efficiency Measurement And Automated Scatter Inspection System (GEMASIS)

R. A. House, R . D. Petty, J. J. Johnston, B. R. Key, G. J. Denton

Proceedings Volume 0560, Diffraction Phenomena in Optical Engineering Applications; (1986) https://doi.org/10.1117/12.949615
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

The GEMASIS is an automated device for general characterization of diffraction and surface scatter. Samples can be measured for out-of-plane as well as for in-plane incidence conditions. In-plane characterization includes angle-resolved measurements of scatter and diffraction orders. The device is described and typical data are shown.

Citation Download Citation

R. A. House, R . D. Petty, J. J. Johnston, B. R. Key, and G. J. Denton "Grating Efficiency Measurement And Automated Scatter Inspection System (GEMASIS)", Proc. SPIE 0560, Diffraction Phenomena in Optical Engineering Applications, (10 May 1986); https://doi.org/10.1117/12.949615

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