Optical characterization of ZnO and ZnMgO films on a-plane sapphires by molecular beam epitaxy

Shuwei Li; Cairong Ding; Guowei Yang; Xiang Zhou; Kazuto Koike

doi:10.1117/12.570751

12 January 2005 Optical characterization of ZnO and ZnMgO films on a-plane sapphires by molecular beam epitaxy

Shuwei Li, Cairong Ding, Guowei Yang, Xiang Zhou, Kazuto Koike

Proceedings Volume 5632, Light-Emitting Diode Materials and Devices; (2005) https://doi.org/10.1117/12.570751
Event: Photonics Asia, 2004, Beijing, China

Abstract

Recently the growth techniques of single-crystalline ZnO film promote much attention to ZnO-related materials for electronic and optoelectronic applications. ZnO and ZnMgO films were grown by radical-source molecular beam epitaxy, and the epilays on a-plane sapphire substrates had a superior quality in crystallographic, optical and electrical properties. The surface during growth was monitored by a reflection high-energy electron diffraction (RHEED) system. After the growth, these films were characterized by Field emission scanning electronic miroscopy, transmission spectrum, photoluminescence (PL) using 325 nm line of a He-Cd laser, and electrical properties were measured by Hall measurement. The n-type doping with Al was successfully performed up to 5 × 10¹⁹ cm^-3. Widening of bandgap energy by increasing Mg composition was observed by transmission spectrum.

Citation Download Citation

Shuwei Li, Cairong Ding, Guowei Yang, Xiang Zhou, and Kazuto Koike "Optical characterization of ZnO and ZnMgO films on a-plane sapphires by molecular beam epitaxy", Proc. SPIE 5632, Light-Emitting Diode Materials and Devices, (12 January 2005); https://doi.org/10.1117/12.570751

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available