Progress in InP-based MOEMS

Martin Strassner; Sophie Bouchoule; Isabelle Sagnes

doi:10.1117/12.582309

23 February 2005 Progress in InP-based MOEMS

Martin Strassner, Sophie Bouchoule, Isabelle Sagnes

Proceedings Volume 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II; (2005) https://doi.org/10.1117/12.582309
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

InP-based micro-opto-electro-mechanical systems (MOEMS) for the long wavelength range (1.3 and 1.55 μm) have been extensively investigated during the last years. The fabrication of ultra-thin and hence ultra-flexible structures that can be actuated electrostatically was limited by residual strain within the structural layers. Highly flexible membranes are necessary if the tuning voltage is to be kept below 10 V and a wide tuning range is required. Adapting the metal-organic vapor phase epitaxial growth conditions, the residual strain was significantly reduced, allowing the fabrication of InP membranes as thin as 30 nm. Tunable micro-cavities (L_cavity=0.5 λ, λ=1.55 μm) with a InP membrane thickness of only 123 nm show an optical tunability of up to 30.5 nm/V² and a maximum tuning range of more than 160 nm. When reducing the thickness to 123 nm (which corresponds to λ/4) a significant deformation of the membranes was observed that has to be taken into account for the fabrication of MOEMS since additional losses are created. A highly selective, widely tunable filter for dense wavelength division multiplexing systems (WDM) was fabricated and exhibits a selectivity of < 0.4 nm throughout the entire tuning range of 48 nm.

Citation Download Citation

Martin Strassner, Sophie Bouchoule, and Isabelle Sagnes "Progress in InP-based MOEMS", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.582309

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microopto electromechanical systems

Mirrors

Tunable filters

Indium gallium arsenide

Silicon

Wavelength division multiplexing

Dense wavelength division multiplexing

Show All Keywords

Keywords/Phrases

Search In:

Publication Years