High-Q microring resonator for biochemical sensors

Junpeng Guo; Michael J. Shaw; G. Allen Vawter; G. Ronald Hadley; Peter Esherick; Charles T. Sullivan

doi:10.1117/12.589467

31 March 2005 High-Q microring resonator for biochemical sensors

Junpeng Guo, Michael J. Shaw, G. Allen Vawter, G. Ronald Hadley, Peter Esherick, Charles T. Sullivan

Proceedings Volume 5728, Integrated Optics: Devices, Materials, and Technologies IX; (2005) https://doi.org/10.1117/12.589467
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

The large refractive index difference between silicon nitride and silicon dioxide allows silicon nitride/dioxide waveguides to have a small mode size and low radiation bending loss. Low radiation bending loss enables high quality (Q) factor microring resonators. In this paper, we will present a record high quality factor microring resonator using silicon nitride and silicon dioxide on a silicon wafer. The microring resonator was fabricated using a deep UV photolithography and etching process. The microring resonator was critically coupled to a straight waveguide. An intrinsic quality factor of 240,000 has been measured. We will also present our result of using on-chip high-Q microring resonators for liquid phase chemical sensing application.

Citation Download Citation

Junpeng Guo, Michael J. Shaw, G. Allen Vawter, G. Ronald Hadley, Peter Esherick, and Charles T. Sullivan "High-Q microring resonator for biochemical sensors", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); https://doi.org/10.1117/12.589467

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