A high-frame-rate DUV-optimized CCD for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high NA imaging systems

Roderick R. Kunz; Dennis D. Rathman; Steven J. Spector; Michael K. Rose; Michael Yeung

doi:10.1117/12.602757

12 May 2005 A high-frame-rate DUV-optimized CCD for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high NA imaging systems

Roderick R. Kunz, Dennis D. Rathman, Steven J. Spector, Michael K. Rose, Michael Yeung

Author Affiliations +

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.602757
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Lincoln Laboratory has designed and fabricated a charge-coupled device (CCD) array capable of imaging both polarization and illumination uniformity. The device consists of an 1107-element linear array of UV-optimized silicon photodiodes read out by a three-stage CCD through a single ~1-MHz output amplifier. This yields an effective clock rate for the whole array of ~1 kHz. Each of the active diode surfaces within the 1107-element array is covered by a UV-opaque layer of polysilicon into which are patterned 140-nm, transmissive sampling slits. The orientation and location of the slits allows simultaneous determination of illumination uniformity, degree and direction of polarization, and polarization uniformity. The device was tested with a 193-nm excimer laser equipped with variably polarized illumination and the theoretical performance of the device was supported by finite-difference time domain optical simulations.

Citation Download Citation

Roderick R. Kunz, Dennis D. Rathman, Steven J. Spector, Michael K. Rose, and Michael Yeung "A high-frame-rate DUV-optimized CCD for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high NA imaging systems", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.602757

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