Nondestructive characterization of micromachined ceramics

Adam Cooney; Kenneth E. Hix; Perry Yaney; Qiwen Zhan; Larry R. Dosser; James L. Blackshire

doi:10.1117/12.599914

9 May 2005 Nondestructive characterization of micromachined ceramics

Adam Cooney, Kenneth E. Hix, Perry Yaney, Qiwen Zhan, Larry R. Dosser, James L. Blackshire

Proceedings Volume 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III; (2005) https://doi.org/10.1117/12.599914
Event: Nondestructive Evaluation for Health Monitoring and Diagnostics, 2005, San Diego, CA, United States

Abstract

The aerospace, automotive, and electronic industries are finding increasing need for components made from silicon carbide (SiC) and silicon nitride (Si₃N₄). The development and use of miniaturized ceramic parts, in particular, is of significant interest in a variety of critical applications. As these application areas grow, manufacturers are being asked to find new and better solutions for machining and forming ceramic materials with microscopic precision. Recent advances in laser machining technologies are making precision micromachining of ceramics a reality. Questions regarding micromachining accuracy, residual melt region effects, and laser-induced microcracking are of critical concern during the machining process. In this activity, a variety of nondestructive inspection methods have been used to investigate the microscopic features of laser-machined ceramic components. The primary goal was to assess the micromachined areas for machining accuracy and microcracking using laser ultrasound, scanning electron microscopy, and white-light interference microscopic imaging of the machined regions.

Citation Download Citation

Adam Cooney, Kenneth E. Hix, Perry Yaney, Qiwen Zhan, Larry R. Dosser, and James L. Blackshire "Nondestructive characterization of micromachined ceramics", Proc. SPIE 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III, (9 May 2005); https://doi.org/10.1117/12.599914

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