CMOS integrator based lock-in pixel for heterodyne interferometry

Oleg Soloviev; Gleb Vdovin

doi:10.1117/12.607728

30 June 2005 CMOS integrator based lock-in pixel for heterodyne interferometry

Oleg Soloviev, Gleb Vdovin

Proceedings Volume 5837, VLSI Circuits and Systems II; (2005) https://doi.org/10.1117/12.607728
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

This article presents a prototype of a CMOS phase sensor for high accuracy (1 Angstrom) heterodyne interferometry. Switched integrators realization of a lock-in pixel for 4-bucket phase detection algorithm is described and illustrated by experimental results. Factors that limit the accuracy of this implementation and possible ways for its improvement are discussed.

Citation Download Citation

Oleg Soloviev and Gleb Vdovin "CMOS integrator based lock-in pixel for heterodyne interferometry", Proc. SPIE 5837, VLSI Circuits and Systems II, (30 June 2005); https://doi.org/10.1117/12.607728

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available