Polarization-insensitive PECVD SiC waveguides for photonic sensing

Gregory Pandraud; Hoa Thi Mai Pham; Lukasz S. Pakula; Pasqualina M. Sarro; Patrick J. French

doi:10.1117/12.624260

23 May 2005 Polarization-insensitive PECVD SiC waveguides for photonic sensing

Gregory Pandraud, Hoa Thi Mai Pham, Lukasz S. Pakula, Pasqualina M. Sarro, Patrick J. French

Proceedings Volume 5855, 17th International Conference on Optical Fibre Sensors; (2005) https://doi.org/10.1117/12.624260
Event: 17th International Conference on Optical Fibre Sensors, 2005, Bruges, Belgium

Abstract

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve low Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. Those waveguides have been successfully used in power splitters and cantilivers. These first devices open the way for photonic sensing in harsh environment using SiC.

Citation Download Citation

Gregory Pandraud, Hoa Thi Mai Pham, Lukasz S. Pakula, Pasqualina M. Sarro, and Patrick J. French "Polarization-insensitive PECVD SiC waveguides for photonic sensing", Proc. SPIE 5855, 17th International Conference on Optical Fibre Sensors, (23 May 2005); https://doi.org/10.1117/12.624260

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