Automatic LCD electro-optical characteristics measurement system based on generalized spectroscopic ellipsometry

Gao-Wei Chang; Yu-Hsuan Lin

doi:10.1117/12.616875

31 August 2005 Automatic LCD electro-optical characteristics measurement system based on generalized spectroscopic ellipsometry

Gao-Wei Chang, Yu-Hsuan Lin

Author Affiliations +

Proceedings Volume 5875, Novel Optical Systems Design and Optimization VIII; 58750W (2005) https://doi.org/10.1117/12.616875
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

Liquid crystal displays (LCDs) or thin-film transistor (TFT) LCDs have been regarded as a promising technology in flat panel displays (FPDs). To meet the demands of the mass production and quality control, the development of automatic electro-optical characteristics measurement systems for LCDs is very important. To achieve this, we propose a generalized spectroscopic ellipsometry (GSE) based technique to measure the characteristics of LCDs. Our approach involves two primary steps. First, we review a theoretical basis for generalized spectroscopic ellipsometries for the LCD measurement. Those are mainly categorized into two classes of ellipsometries: the transmission variable angle spectroscopic ellipsometry (VASE) and the spectroscopic ellipsometry (SE) using a photoelastic modulator (PEM), called PEM SE. Second, on the basis of the VASE and PEM SE, we present a GSE-based system to measure the electro-optical characteristics for twisted nematic liquid crystals (TNLCs) and super twisted nematic liquid crystals (STNLCs). In this paper, the simulation results indicate the feasibility of this technique. Finally, the automatic GSE-based system is presented for measuring the LCD electro-optical characteristics.

Citation Download Citation

Gao-Wei Chang and Yu-Hsuan Lin "Automatic LCD electro-optical characteristics measurement system based on generalized spectroscopic ellipsometry", Proc. SPIE 5875, Novel Optical Systems Design and Optimization VIII, 58750W (31 August 2005); https://doi.org/10.1117/12.616875

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available