Digital two-wavelength holographic interference microscopy for surface roughness measurement

Miloslav Ohlídal; Ludek Šír; Miloš Jákl; Ivan Ohlídal

doi:10.1117/12.638915

6 December 2006 Digital two-wavelength holographic interference microscopy for surface roughness measurement

Miloslav Ohlídal, Ludek Šír, Miloš Jákl, Ivan Ohlídal

Proceedings Volume 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 59450I (2006) https://doi.org/10.1117/12.638915
Event: 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2005, Nitra, Slovakia

Abstract

A new approach to surface roughness measurement based on the digital two-wavelength holographic interference microscopy with the synthetic wavelength is presented. Two holograms of a randomly rough surface are recorded step by step at two wavelengths by means of a CCD camera. Both holograms are numerically reconstructed. Two reconstructed waves obtained numerically interfere. The surface roughness parameters may be determined from the interferogram.

Citation Download Citation

Miloslav Ohlídal, Ludek Šír, Miloš Jákl, and Ivan Ohlídal "Digital two-wavelength holographic interference microscopy for surface roughness measurement", Proc. SPIE 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 59450I (6 December 2006); https://doi.org/10.1117/12.638915

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