Testing system for extreme ultraviolet detectors

Janusz Mikołajczyk; Zbigniew Bielecki; Jacek Wojtas

doi:10.1117/12.621814

7 October 2005 Testing system for extreme ultraviolet detectors

Janusz Mikołajczyk, Zbigniew Bielecki, Jacek Wojtas

Proceedings Volume 5948, Photonics Applications in Industry and Research IV; 594822 (2005) https://doi.org/10.1117/12.621814
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

The paper presents analyses of a testing system of extreme ultraviolet detectors. The testing procedure concerns determination of a quantum efficiency of photodiode detectors. The testing method is based on a comparison of the detected signals from the model detector and the tested one The system consists of a gas-puff laser plasma source, a metrology chamber with an optical system, and a model energy detector. Theoretical and experimental investigations, including optimisation of efficiency and stability of the radiation source, calculation of a charge measurement accuracy of the model detector, determination of mirrors reflectivity and its angle dependence are discussed.

Citation Download Citation

Janusz Mikołajczyk, Zbigniew Bielecki, and Jacek Wojtas "Testing system for extreme ultraviolet detectors", Proc. SPIE 5948, Photonics Applications in Industry and Research IV, 594822 (7 October 2005); https://doi.org/10.1117/12.621814

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