Angle resolved scatter measurements on optical components

P. Kadkhoda; H. Mädebach; D. Ristau

doi:10.1117/12.625398

19 October 2005 Angle resolved scatter measurements on optical components

P. Kadkhoda, H. Mädebach, D. Ristau

Proceedings Volume 5965, Optical Fabrication, Testing, and Metrology II; 59651A (2005) https://doi.org/10.1117/12.625398
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

For precise angle resolved scatter (ARS) investigations on optical components, a scatterometer has been developed, which allows three dimensional scanning of the scattered radiation from the test specimen. By combining the set-up with different radiation sources, measurements in the spectral region from the DUV- to the NIR-spectral range can be performed. The optical properties of the components: reflection, transmittance, and the scatter behavior can be determined in the same run. The measured data are absolutely calibrated to the incident power. In this paper, we report about ARS- measurements on different samples such as holographic gratings, bare and anti reflective coated substrates. Additionally, results of scatter measurements on high reflective mirrors for 633nm with different numbers of layers will be presented. The comparison of the ARS-data and the results of Total Scattering (according to ISO 13696) on the same samples will be discussed.

Citation Download Citation

P. Kadkhoda, H. Mädebach, and D. Ristau "Angle resolved scatter measurements on optical components", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 59651A (19 October 2005); https://doi.org/10.1117/12.625398

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