Grating interferometry method for torsion measurement

Xiang-rong Li; Yan-feng Qiao; Wei Liu; Yao-yu Zhang

doi:10.1117/12.668322

20 January 2006 Grating interferometry method for torsion measurement

Xiang-rong Li, Yan-feng Qiao, Wei Liu, Yao-yu Zhang

Proceedings Volume 6027, ICO20: Optical Information Processing; 602739 (2006) https://doi.org/10.1117/12.668322
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Method of grating interferometry was presented for torsion angle measurement, moire fringe generated by two gratings is used in a new field, it breaks through moire fringe's routine application. Measurement principle is described, torsion angle can be gotten by the tilt angle or the width of moire fringe. Different from moire fringe's characteristic information extracting methods in traditional measurement fields, fringe-tilt method and fringe-width method were put forward to extract moire fringe's characteristic information. Fringe-tilt method is on the basis of moire fringe's tilt to acquire torsion angle, uniform formula was built aiming at all positions of two gratings in the coordinates, fringe-width method is on the basis of moire fringe's width to acquire torsion angle, three key problems are given about fringe-width method. Thick, middle and thin moire fringe were collected in experiments and processed by two methods, fringe-width method's result shows that magnitude of boat torsion error is satisfied with that of theoretical precision analysis, and the change rule of torsion error is also same to that of theoretical analysis, the thicker fringe is, the higher precision is, when fringe width arrives to be 1695μm, the precision is 1.7", the thinner fringe is, the lower precision is, when fringe width arrives to be 734.7μm, the precision is 6.7". In addition to these, the results of repeatability experiments, sensibility experiments are given. In a word, the measurement principle is right and the precision of fringe processing is also reliable.

Citation Download Citation

Xiang-rong Li, Yan-feng Qiao, Wei Liu, and Yao-yu Zhang "Grating interferometry method for torsion measurement", Proc. SPIE 6027, ICO20: Optical Information Processing, 602739 (20 January 2006); https://doi.org/10.1117/12.668322

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