Monolithic PZT microstage wth multidegrees of freedom for high-precision positioning

H. G. Xu; K. Okamoto; D. Y. Zhang; T. Ono; M. Esashi

doi:10.1117/12.667849

7 February 2006 Monolithic PZT microstage with multidegrees of freedom for high-precision positioning

H. G. Xu, K. Okamoto, D. Y. Zhang, T. Ono, M. Esashi

Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 603205 (2006) https://doi.org/10.1117/12.667849
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

This paper presents the fabrication and characterizations of a PZT actuated monolithic microstage with multi degrees of freedom (DOFs) used for high-precision positioning. The entire device is fabricated in a symmetrically arrangement from a PZT plate with a size of 15×15×0.8 mm³. Four actuation units with a displacement amplification mechanism are integrated in the structure. They can be driven individually which result in movements of a stage in different directions. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 μm in x- and y-axes and 10 μm in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.

Citation Download Citation

H. G. Xu, K. Okamoto, D. Y. Zhang, T. Ono, and M. Esashi "Monolithic PZT microstage with multidegrees of freedom for high-precision positioning", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 603205 (7 February 2006); https://doi.org/10.1117/12.667849

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