Multi-modal miniaturized microscope: successful merger of optical, MEMS, and electronic technologies

Tomasz S. Tkaczyk; Jeremy D. Rogers; Mohammed Rahman; Todd C. Christenson; Stephen Gaalema; Eustace L. Dereniak; Rebecca Richards-Kortum; Michael R. Descour

doi:10.1117/12.668275

9 December 2005 Multi-modal miniaturized microscope: successful merger of optical, MEMS, and electronic technologies

Tomasz S. Tkaczyk, Jeremy D. Rogers, Mohammed Rahman, Todd C. Christenson, Stephen Gaalema, Eustace L. Dereniak, Rebecca Richards-Kortum, Michael R. Descour

Author Affiliations +

Proceedings Volume 6050, Optomechatronic Micro/Nano Devices and Components; 605016 (2005) https://doi.org/10.1117/12.668275
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan

Abstract

The multi-modal miniature microscope (4M) device for early cancer detection is based on micro-optical table (MOT) platform which accommodates on a chip: optical, micro-mechanical, and electronic components. The MOT is a zeroalignment optical-system concept developed for a wide variety of opto-mechanical instruments. In practical terms this concept translates into assembly errors that are smaller than the tolerances on the performance of the optical system. This paper discusses all major system elements: optical system, custom high speed CMOS detector and comb drive actuator. It also points to mutual relations between different technologies. The hybrid sol-gel lenses, their fabrication and assembling techniques, optical system parameters, and various operation modes are also discussed. A particularly interesting mode is a structured illumination technique that delivers confocal-imaging capabilities and may be used for optical sectioning. Structured illumination is produced with LIGA fabricated actuator scanning in resonance and reconstructed using sine approximation algorithm.

Citation Download Citation

Tomasz S. Tkaczyk, Jeremy D. Rogers, Mohammed Rahman, Todd C. Christenson, Stephen Gaalema, Eustace L. Dereniak, Rebecca Richards-Kortum, and Michael R. Descour "Multi-modal miniaturized microscope: successful merger of optical, MEMS, and electronic technologies", Proc. SPIE 6050, Optomechatronic Micro/Nano Devices and Components, 605016 (9 December 2005); https://doi.org/10.1117/12.668275

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