Optimized precision micromachining using commercially available high-repetition rate microjoule femtosecond fiber lasers

Michelle L. Stock; Lawrence Shah; Bing Liu; Makoto Yoshida; Fumiyo Yoshino; James Bovatsek; Alan Arai

doi:10.1117/12.659866

28 February 2006 Optimized precision micromachining using commercially available high-repetition rate microjoule femtosecond fiber lasers

Michelle L. Stock, Lawrence Shah, Bing Liu, Makoto Yoshida, Fumiyo Yoshino, James Bovatsek, Alan Arai

Author Affiliations +

Proceedings Volume 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI; 61080Q (2006) https://doi.org/10.1117/12.659866
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Fiber lasers offer an excellent technology base for production of an industrial-quality tool for precision microfabrication, answering the need to expand the capabilities of laser material processing beyond traditional welding, cutting, and other industrial processes. IMRA's FCPA μJewel^TM femtosecond fiber laser has been developed to address the particular need for direct-write lasers for creation of clean and high-quality micron and sub-micron features in materials of commercial interest. This flexible Yb:fiber chirped-pulse amplification architecture, capable of operating at rep-rates between 100 kHz and 5 MHz, balances the need for higher-repetition rate with that of sufficient pulse energy to work at or near ablation threshold, while meeting industrial standards for temperature, shock and vibration. Demonstration of the need for higher-repetition rates for direct write processes will be provided in this paper. Further, results of laser-processing of materials typically used in flat panel displays, photomasks, and waveguide production using the FCPA μJewel^TM laser will be presented.

Citation Download Citation

Michelle L. Stock, Lawrence Shah, Bing Liu, Makoto Yoshida, Fumiyo Yoshino, James Bovatsek, and Alan Arai "Optimized precision micromachining using commercially available high-repetition rate microjoule femtosecond fiber lasers", Proc. SPIE 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI, 61080Q (28 February 2006); https://doi.org/10.1117/12.659866

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