Thermal effects in three-dimensional recording by femto/nano-second pulses

Saulius Juodkazis; Mingwei Li; Dmitry Kotin; Igor Maksimov; Egidijus Vanagas; Hiroaki Misawa

doi:10.1117/12.641130

15 February 2006 Thermal effects in three-dimensional recording by femto/nano-second pulses

Saulius Juodkazis, Mingwei Li, Dmitry Kotin, Igor Maksimov, Egidijus Vanagas, Hiroaki Misawa

Proceedings Volume 6118, Ultrafast Phenomena in Semiconductors and Nanostructure Materials X; 611807 (2006) https://doi.org/10.1117/12.641130
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

Thermal effects are unavoidable in laser material processing and are present, to some extent, even in the case when ultra-short (sub-picosecond) pulsed irradiation is used. We discuss here the matters of high-precision energy delivery into micrometer-sized volumes for three-dimensional (3D) laser microfabrication. Precise account of the absorbed energy, pulse duration, and focal spot size allows to optimize laser processing parameters. As an example, a 3D micro-structuring of silica with better than 15 μm resolution is demonstrated by pulses of 11 ns duration and 266 nm wavelength (for a focusing by a low numerical aperture NA = 0.029 lens). The two photon absorption coefficient of silica, β ≃ 60 ± 10 cm/GW, at 266 nm has been determined. The thermal black-body type emission of non-equilibrated electrons is discussed as a possible light source for 3D modification and structuring of photo-sensitive and photo-polymerizable materials. It is also demonstrated that optical properties of ionized dielectrics can be used to determine the temperature.

Citation Download Citation

Saulius Juodkazis, Mingwei Li, Dmitry Kotin, Igor Maksimov, Egidijus Vanagas, and Hiroaki Misawa "Thermal effects in three-dimensional recording by femto/nano-second pulses", Proc. SPIE 6118, Ultrafast Phenomena in Semiconductors and Nanostructure Materials X, 611807 (15 February 2006); https://doi.org/10.1117/12.641130

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