ZnO based light emitting diodes growth and fabrication

M. Pan; R. Rondon; J. Cloud; V. Rengarajan; W. Nemeth; A. Valencia; J. Gomez; N. Spencer; J. Nause

doi:10.1117/12.659240

2 March 2006 ZnO based light emitting diodes growth and fabrication

M. Pan, R. Rondon, J. Cloud, V. Rengarajan, W. Nemeth, A. Valencia, J. Gomez, N. Spencer, J. Nause

Proceedings Volume 6122, Zinc Oxide Materials and Devices; 61220M (2006) https://doi.org/10.1117/12.659240
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

ZnO and N-doped ZnO thin films were grown by MOCVD on sapphire and ZnO substrates. Diethyl zinc and O₂ were used as sources for Zn and O, respectively. A specially designed plasma system was employed to produce atomic N dopant for in-situ doping. Proper disk rotation speeds were found for ZnO growth on different size wafers. High crystal quality N-doped ZnO films were grown based on optimized growth conditions. Wet chemical etch of ZnO was investigated by using NH₄Cl, and etch activation energy was calculated to be 463meV. Ohmic contact on N-doped ZnO film was achieved by using Ni/Au/Al multiple layers. ZnO based p-n junction has demonstrated rectification. Electroluminescence at about 384nm was obtained from ZnO based LED.

Citation Download Citation

M. Pan, R. Rondon, J. Cloud, V. Rengarajan, W. Nemeth, A. Valencia, J. Gomez, N. Spencer, and J. Nause "ZnO based light emitting diodes growth and fabrication", Proc. SPIE 6122, Zinc Oxide Materials and Devices, 61220M (2 March 2006); https://doi.org/10.1117/12.659240

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available