Catadioptric lens design: the breakthrough to hyper-NA optics

Bernhard Kneer; Paul Gräupner; Reiner Garreis; Ralph Kläsges; Heiko Feldmann

doi:10.1117/12.668024

15 March 2006 Catadioptric lens design: the breakthrough to hyper-NA optics

Bernhard Kneer, Paul Gräupner, Reiner Garreis, Ralph Kläsges, Heiko Feldmann

Proceedings Volume 6154, Optical Microlithography XIX; 615420 (2006) https://doi.org/10.1117/12.668024
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

To enable optical lithography for sub 55 nm features, ArF immersion lithography requires numerical apertures to be significantly larger than 1 - thus leading to new challenges for optical design. Refractive lens designs are not capable to capture these extreme etendues. Catadioptric lens designs can overcome these fundamental issues by keeping the diameters of the optical materials acceptable. We have studied various catadioptric design approaches. The main criteria used to evaluate the potential of the different solutions include mechanical complexity, reticle compatibility, optical sensitivities, polarization capabilities, image field shape, as well as enabling extendibility to even higher NAs. Our assessment leads us to a new design type called catadioptric in-line design which shows superior performance for high NA systems with NA > 1.1.

Citation Download Citation

Bernhard Kneer, Paul Gräupner, Reiner Garreis, Ralph Kläsges, and Heiko Feldmann "Catadioptric lens design: the breakthrough to hyper-NA optics", Proc. SPIE 6154, Optical Microlithography XIX, 615420 (15 March 2006); https://doi.org/10.1117/12.668024

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