Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography

Arthur Tay; Weng-Khuen Ho; Ni Hu; Kuen-Yu Tsai; Ying Zhou

doi:10.1117/12.654741

10 March 2006 Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography

Arthur Tay, Weng-Khuen Ho, Ni Hu, Kuen-Yu Tsai, Ying Zhou

Proceedings Volume 6155, Data Analysis and Modeling for Process Control III; 61550A (2006) https://doi.org/10.1117/12.654741
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

An in-situ method to control the steady-state wafer temperature uniformity during thermal processing in microlithography is presented. Based on first principle thermal modeling of the thermal system, the temperature of the wafer can be estimated and controlled in real-time by monitoring the bake-plate temperature profile. This is useful as production wafers usually do not have temperature sensors embedded on it, these bake-plates are usually calibrated based on test wafers with embedded sensors. However as processes are subjected to process drifts, disturbances and wafer warpages, real-time correction of the bake-plate temperatures to achieve uniform wafer temperature at steady-state is not possible in current baking systems. Any correction is done based on run-to-run control techniques which depends on the sampling frequency of the wafers. Our approach is real-time and can correct for any variations in the desired steady-state wafer temperature. Experimental results demonstrate the feasibility of the approach.

Citation Download Citation

Arthur Tay, Weng-Khuen Ho, Ni Hu, Kuen-Yu Tsai, and Ying Zhou "Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography", Proc. SPIE 6155, Data Analysis and Modeling for Process Control III, 61550A (10 March 2006); https://doi.org/10.1117/12.654741

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available