Accurate OPC model generation through use of a streamlined data flow incorporating automated test-structure layout and CD-SEM recipe generation

Mary Coles; Lewis Flanagin; Ben Rathsack; Steve Prins; James Blatchford

doi:10.1117/12.660600

14 March 2006 Accurate OPC model generation through use of a streamlined data flow incorporating automated test-structure layout and CD-SEM recipe generation

Mary Coles, Lewis Flanagin, Ben Rathsack, Steve Prins, James Blatchford

Author Affiliations +

Proceedings Volume 6156, Design and Process Integration for Microelectronic Manufacturing IV; 615614 (2006) https://doi.org/10.1117/12.660600
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

In this paper we present a method that optimizes the OPC model generation process. The elements in this optimized flow include: an automated test structure layout engine; automated SEM recipe creation and data collection; and OPC model anchoring/validation software. The flow is streamlined by standardizing and automating these steps and their inputs and outputs. A major benefit of this methodology is the ability to perform multiple OPC "screening" refinement loops in a short time before embarking on final model generation. Each step of the flow is discussed in detail, as well as our multi-pass experimental design for converging on a final OPC data set. Implementation of this streamlined process flow drastically reduces the time to complete OPC modeling, and allows generation of multiple complex OPC models in a short time, resulting in faster release and transfer of a next-generation product to manufacturing.

Citation Download Citation

Mary Coles, Lewis Flanagin, Ben Rathsack, Steve Prins, and James Blatchford "Accurate OPC model generation through use of a streamlined data flow incorporating automated test-structure layout and CD-SEM recipe generation", Proc. SPIE 6156, Design and Process Integration for Microelectronic Manufacturing IV, 615614 (14 March 2006); https://doi.org/10.1117/12.660600

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