Cylindrical microlenses fabricated by deep proton writing

Virginia Gómez; Bart Volckaerts; Pedro Vynck; Heidi Ottevaere; Hugo Thienpont

doi:10.1117/12.662500

21 April 2006 Cylindrical microlenses fabricated by deep proton writing

Virginia Gómez, Bart Volckaerts, Pedro Vynck, Heidi Ottevaere, Hugo Thienpont

Proceedings Volume 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration; 618517 (2006) https://doi.org/10.1117/12.662500
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

With our in-house technology, Deep Proton Writing (DPW) we fabricate, apart from other components, spherical refractive microlenses. Till now, the fabrication of cylindrical microlenses was an unexplored field within our technology. In this paper we will show how we can use Deep Proton Writing as an effective technology for the fabrication of cylindrical microlenses and microlens arrays with specific design parameters. We will explain the adjustments we made to our standard fabrication process as well as the investigation procedure we followed to fulfill our goal.

Citation Download Citation

Virginia Gómez, Bart Volckaerts, Pedro Vynck, Heidi Ottevaere, and Hugo Thienpont "Cylindrical microlenses fabricated by deep proton writing", Proc. SPIE 6185, Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration, 618517 (21 April 2006); https://doi.org/10.1117/12.662500

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