Development of a metrology to characterize EUV optics at 13.5nm

Monika Vongehr; Peter Predehl; Günter Hasinger

doi:10.1117/12.662816

25 April 2006 Development of a metrology to characterize EUV optics at 13.5nm

Monika Vongehr, Peter Predehl, Günter Hasinger

Proceedings Volume 6187, Photon Management II; 618709 (2006) https://doi.org/10.1117/12.662816
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Light sources, focusing elements and detectors working at wavelengths from 5nm to 40nm, so called EUV, are of increasing interest for the semiconductor industry, especially for lithography. A metrology has been developed to characterize modified nested Wolter grazing incidence optics which act as the condenser optic. It consists of a monochromatic EUV source and a MCP detector. The EUV source is designed to emit radiation at a wavelength of 13.5nm into a solid angle of up to 1.8sr, which is realized by a silicon-zirconium target used in transmission. Detector and EUV source have been calibrated. In particular, the angular dependences of the source radiation and the detector efficiency have been investigated. The calibrated metrology could be used for measuring the imaging properties of modified nested Wolter optics revealing the point-spread function (psf), the focal length and the effective collecting area. In this paper we will report on experimental setup in the X-ray test facility "PUMA," developing the EUV source, multi-channel plate detector properties, and the results of testing a modified EUV optics.

Citation Download Citation

Monika Vongehr, Peter Predehl, and Günter Hasinger "Development of a metrology to characterize EUV optics at 13.5nm", Proc. SPIE 6187, Photon Management II, 618709 (25 April 2006); https://doi.org/10.1117/12.662816

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available