Calibration of test masks used for lithography lens systems

M. Arnz; W. Häβler-Grohne; B. Bodermann; H. Bosse

doi:10.1117/12.692735

21 June 2006 Calibration of test masks used for lithography lens systems

M. Arnz, W. Häβler-Grohne, B. Bodermann, H. Bosse

Proceedings Volume 6281, 22nd European Mask and Lithography Conference; 62810C (2006) https://doi.org/10.1117/12.692735
Event: 22nd European Mask and Lithography Conference, 2006, Dresden, Germany

Abstract

We report on the calibration approach and results as well as the application of special test masks for the qualification process of projection lens systems for advanced wafer steppers and scanners. We concentrate here on two different sets of test masks. One test mask set was designed for aerial image based contrast metrology while the other set of qualification masks was applied to provide an absolute reference for the magnification of the lens system. On the contrast test masks we measured variations of CD ratios of about 10% for differently oriented structures. Additionally we compared the lithography lens magnification obtained by using both grating test masks calibrated by the PTB with a pitch ratio uncertainty of 5 x 10^-7 with that obtained by employing alternative external scale calibration standards.

Citation Download Citation

M. Arnz, W. Häβler-Grohne, B. Bodermann, and H. Bosse "Calibration of test masks used for lithography lens systems", Proc. SPIE 6281, 22nd European Mask and Lithography Conference, 62810C (21 June 2006); https://doi.org/10.1117/12.692735

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available