Paper
31 August 2006 High aspect ratio line shapes generated with a diffractive/refractive hybrid approach
Kurt Kanzler, Richard Cendejas
Author Affiliations +
Abstract
High aspect ratio line shapes can be generated using a diffractive remapping beam shaper and a refractive cylinder lens. A typical line shape is 10 mm in the long uniform axis and 0.05 mm or less in the Gaussian axis. The use of a TEM00 allows for a diffraction limited short axis focus while expanding to sizes of greater than 100 mm in the uniform direction. In applications that require scanning, the Gaussian axis is perpendicular to the scan direction and the uniform axis is parallel to the scan direction resulting in a uniform (time averaged) illumination in both axis. Many laser users throw away > 50 % of their laser power to achieve these line shapes, while using this diffractive/refractive hybrid approach > 90 % of the total input energy can be utilized.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kurt Kanzler and Richard Cendejas "High aspect ratio line shapes generated with a diffractive/refractive hybrid approach", Proc. SPIE 6290, Laser Beam Shaping VII, 62900I (31 August 2006); https://doi.org/10.1117/12.681681
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KEYWORDS
Beam shaping

Laser applications

Cameras

Lithographic illumination

Laser processing

Transmission electron microscopy

Annealing

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