Paper
21 September 2006 Determination of the transmittance and extinction coefficient of Yb films in the 23-1700 eV range
Juan I. Larruquert, Mónica Fernández-Perea, José A. Aznárez, José A. Méndez, Luca Poletto, Denis Garoli, A. Marco Malvezzi, Angelo Giglia, Stefano Nannarone
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Abstract
The transmittance of thin films of Yb deposited by evaporation in ultra high vacuum (UHV) conditions have been investigated in the 23-1,700 eV spectral range. Transmittance measurements were performed in situ on Yb films deposited over grids coated with a thin, C support film. Transmittance measurements were used to obtain the extinction coefficient of Yb films at each individual photon energy investigated. The energy range investigated encompasses M, N, and O edges of Yb. The current results, along with data in the literature, show that Yb has an interesting low-absorption band in the ~12-24 eV range. The promising characteristics of Yb as a filter material in this region requires the development of a protection material due to the reactivity of Yb under normal atmosphere. The low absorption of Yb in the above range makes it also a candidate for a component of multilayer coatings in a spectral region in which few developments have been performed due to the lack of low absorption materials. The fl sum-rule was applied to extinction coefficient data in the whole spectrum that included the current data along with those of the literature, resulting in a value of 70.26, which is close to the expected value of 69.32.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juan I. Larruquert, Mónica Fernández-Perea, José A. Aznárez, José A. Méndez, Luca Poletto, Denis Garoli, A. Marco Malvezzi, Angelo Giglia, and Stefano Nannarone "Determination of the transmittance and extinction coefficient of Yb films in the 23-1700 eV range", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 63170S (21 September 2006); https://doi.org/10.1117/12.680930
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Cited by 4 scholarly publications.
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KEYWORDS
Ytterbium

Transmittance

Mass attenuation coefficient

Reflectivity

Thin films

Extreme ultraviolet

Absorption

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