Development of Mg/SiC multilayer mirrors

Go Murakami; Kazuo Yoshioka; Ichiro Yoshikawa

doi:10.1117/12.679965

29 August 2006 Development of Mg/SiC multilayer mirrors

Go Murakami, Kazuo Yoshioka, Ichiro Yoshikawa

Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 631714 (2006) https://doi.org/10.1117/12.679965
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

A multilayer coating mirror of Mo/Si is usually used for space science in the spectral range of extreme ultraviolet (EUV), especially for He-II (30.4 nm) radiation, because it is highly stable under vacuum and atmosphere. It has the fairly high reflectivity of 15-20%. But the space science community needs the coating of higher reflectivity at 30.4 nm radiation for the future satellite missions, especially for the small satellite (to reduce the size of optics). In this work, for developing a new multilayer mirror for He-II radiation, we report the performance of a multilayer consisting of Mg/SiC and the aging in reflectivity under atmosphere and vacuum.

Citation Download Citation

Go Murakami, Kazuo Yoshioka, and Ichiro Yoshikawa "Development of Mg/SiC multilayer mirrors", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631714 (29 August 2006); https://doi.org/10.1117/12.679965

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