The dynamic stress in micro-structures studied by Raman spectroscopy

Chenyang Xue; Lina Zheng; Jijun Xiong; Wendong Zhang; Shengbo Sang

doi:10.1117/12.693651

10 June 2006 The dynamic stress in micro-structures studied by Raman spectroscopy

Chenyang Xue, Lina Zheng, Jijun Xiong, Wendong Zhang, Shengbo Sang

Proceedings Volume 6344, Advanced Laser Technologies 2005; 63442K (2006) https://doi.org/10.1117/12.693651
Event: Advanced Laser Technologies 2005, 2005, Tianjin, China

Abstract

Stress distribution is one of the main factors influencing the reliability of MEMS (Micro Electro Mechanical System) structure. In most cases, MEMS devices work in motion state, the dynamic stress often affects the performances of the MEMS devices. For the first time, dynamic streses were measured by means of Raman spectroscopy and high-frequency modulation technology, the measurement result shows that dynamic stress at a certain point in silicon micro-resonator is in agreement with the analysis of theory.

Citation Download Citation

Chenyang Xue, Lina Zheng, Jijun Xiong, Wendong Zhang, and Shengbo Sang "The dynamic stress in micro-structures studied by Raman spectroscopy", Proc. SPIE 6344, Advanced Laser Technologies 2005, 63442K (10 June 2006); https://doi.org/10.1117/12.693651

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available