Real-time high-displacement amplified bimorph scanning mirror

Paul E. Patterson; Jason M. Zara

doi:10.1117/12.686383

19 October 2006 Real-time high-displacement amplified bimorph scanning mirror

Paul E. Patterson, Jason M. Zara

Proceedings Volume 6374, Optomechatronic Actuators, Manipulation, and Systems Control; 63740B (2006) https://doi.org/10.1117/12.686383
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

This paper provides an overview of recent research in the use of microelectromechanical systems (MEMS) actuators for beam steering applications, including optical coherence tomography (OCT). Prototype scanning devices have been fabricated out of polyimide substrates using conventional integrated circuit technology. The devices utilize piezoelectric bimorphs to mechanically actuate the torsion mirror structure made of polyimide. The material properties of the polyimide allow very large scan angles to be realized in the devices while using low voltages. Prototype devices have demonstrated optical scan angles of over 80 degrees with applied voltages of only 40V. Different device sizes have also been demonstrated with resonant frequencies between 15-60Hz (appropriate for real-time imaging). Analytical models have been developed that predict resonant frequency of the device as well as the angular displacement of the mirror. Further finite element modeling (FEM) has been done using ANSYS. These models closely reflect measured scan angles of the prototype devices. Based upon these models, further refinements can be made to the design to produce specific resonant frequencies for use in a multitude of applications. These models are currently being used to design and fabricate multiple devices on a single wafer with minimal post processing requirements. The ability to fabricate these devices in bulk will reduce their cost and potentially make them disposable to reduce the cost of their use in numerous applications, including patient care when used in biomedical imaging applications.

Citation Download Citation

Paul E. Patterson and Jason M. Zara "Real-time high-displacement amplified bimorph scanning mirror", Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 63740B (19 October 2006); https://doi.org/10.1117/12.686383

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