Accuracy problems in phase shift based 3D machine vision inspection systems

Igor Dunin-Barkowski; Jae-Seon Kim

doi:10.1117/12.685494

12 October 2006 Accuracy problems in phase shift based 3D machine vision inspection systems

Igor Dunin-Barkowski, Jae-Seon Kim

Proceedings Volume 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV; 63820F (2006) https://doi.org/10.1117/12.685494
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

Booming demand for high speed and high accuracy 3D inspection, especially in the area of manufacturing of electronic devices and components, causes fast progress in research related to this area and significant improvement in these systems capabilities, specification and features. Accuracy can be considered as one of the most important features for 3D machine vision inspection systems, probably along with speed and robustness. Phase shift based systems are believed to be among the most accurate 3D measurement systems with resolution at sub-micron level, though to achieve such a high resolution and accuracy considerable efforts should be made and various physical effects should be taken into consideration. 3D accuracy problems comprise of 2D accuracy problems, such as camera radial and perspective distortions, subpixel measurement problems, etc. combined with special issues related specifically to the phase-shift measurement profilometry. Among them there are distortions of the projected light pattern, including projector radial, perspective distortions and non-sinusoidality of the projected pattern (harmonic distortion) and dynamic range problems caused by camera's signal to noise ratio and by constraints of limited digitized signal bit width. To eliminate or minimize negative influence of the above mentioned factors, a number of measures should be carried out when making 3D measurement head design followed by compensation and calibration procedures. Experimental results on various accuracy problems based on real 3D measurement system developed by authors as well as simulation results are presented in this paper.

Citation Download Citation

Igor Dunin-Barkowski and Jae-Seon Kim "Accuracy problems in phase shift based 3D machine vision inspection systems", Proc. SPIE 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV, 63820F (12 October 2006); https://doi.org/10.1117/12.685494

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