Direct Phase Measurement Of Aspheric Surface Contours

Katherine Creath; James C. Wyant

doi:10.1117/12.964494

3 November 1986 Direct Phase Measurement Of Aspheric Surface Contours

Katherine Creath, James C. Wyant

Proceedings Volume 0645, Optical Manufacturing, Testing and Aspheric Optics; (1986) https://doi.org/10.1117/12.964494
Event: 1986 Technical Symposium Southeast, 1986, Orlando, United States

Abstract

Two-wavelength holography and phase-shifting interferometry are combined to measure aspheric surface contours with a variable sensitivity. In this technique, the surface is effectively tested at a synthesized longer equivalent wavelength ^λeq = ^λa^λb|^λa - ^λb| using measurements made at wavelengths ^λa and ^λb where the difference of the phases measured for ^λa and ^λb yields the modulo 2π phase at ^λ_eq. A mask of point apertures is placed over the detector array in order to resolve closely spaced fringes. This technique has an rms repeatability of ^λ_eq/100. Limits to this technique are discussed and results are shown.

Citation Download Citation

Katherine Creath and James C. Wyant "Direct Phase Measurement Of Aspheric Surface Contours", Proc. SPIE 0645, Optical Manufacturing, Testing and Aspheric Optics, (3 November 1986); https://doi.org/10.1117/12.964494

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