Testing reliability of MEMS materials in liquids

Thomas P. Kuehn; S. Mubassar Ali; Susan C. Mantell; Ellen K. Longmire

doi:10.1117/12.706552

19 January 2007 Testing reliability of MEMS materials in liquids

Thomas P. Kuehn, S. Mubassar Ali, Susan C. Mantell, Ellen K. Longmire

Proceedings Volume 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; 64630L (2007) https://doi.org/10.1117/12.706552
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

MEMS are increasingly being considered for applications that involve immersion in liquids. However, there are very little reliability data for MEMS structures in liquids environments. In this study, an apparatus was developed which enables the investigation of fatigue failure of MEMS in liquids. MEMS cantilever beams were mounted on a PZT piezoelectric actuator and immersed in a liquid. A laser is reflected off the tip of the vibrating cantilever and onto a position-sensing photo-diode device (PSD) to obtain position data. From this data resonance frequency can be extracted for long-term monitoring. Cantilevers are resonated for at least 10⁸ cycles. This apparatus allows for the testing of many combinations of materials and environments. For this study, the fatigue performance in liquid of silicon nitride cantilever beams was evaluated and compared to single crystal silicon cantilever beams. Tests were conducted in deionized water and a saline solution. Silicon nitride exhibited no long-term degradation of resonance frequency within measurement limits in air, DI water, and saline environments. Silicon exhibited a steady decrease in resonance. Results showed that this method could be extended to conduct reliability studies on other MEMS materials.

Citation Download Citation

Thomas P. Kuehn, S. Mubassar Ali, Susan C. Mantell, and Ellen K. Longmire "Testing reliability of MEMS materials in liquids", Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630L (19 January 2007); https://doi.org/10.1117/12.706552

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available