Nanoelectromechanical systems as single electron switches and field emitters

Hyun S. Kim; Hua Qin; Robert H. Blick

doi:10.1117/12.702611

12 February 2007 Nanoelectromechanical systems as single electron switches and field emitters

Hyun S. Kim, Hua Qin, Robert H. Blick

Proceedings Volume 6464, MEMS/MOEMS Components and Their Applications IV; 646407 (2007) https://doi.org/10.1117/12.702611
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

We measured field emission from a silicon nanopillar mechanically oscillating between two electrodes. The pillar has a height of about 200 nm and a diameter of 50 nm, allowing resonant mechanical excitations at radio frequencies. The tunneling barriers for field emission are mechanically modulated via displacement of the gold island on top of the pillar. We present a rich frequency-dependent response of the emission current in the frequency range of 300 ~ 400 MHz at room temperature. Modified Fowler-Nordheim field emission is observed and attributed to the mechanical oscillations of the nanopillar.

Citation Download Citation

Hyun S. Kim, Hua Qin, and Robert H. Blick "Nanoelectromechanical systems as single electron switches and field emitters", Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 646407 (12 February 2007); https://doi.org/10.1117/12.702611

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