Six-axis compliant mechanisms for manipulation of micro-scale fiber optics components

Shih-Chi Chen; Martin L. Culpepper; Scott Jordan

doi:10.1117/12.702140

22 January 2007 Six-axis compliant mechanisms for manipulation of micro-scale fiber optics components

Shih-Chi Chen, Martin L. Culpepper, Scott Jordan

Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 64660P (2007) https://doi.org/10.1117/12.702140
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

In this paper, we discuss the characteristics of a six-axis, micro-scale nanopositioner and steps that have been taken to adapt it for use in aligning and manipulating micro-optics. This device, the microHexFlex, is designed to possess motion and force characteristics that enable it to align or manipulate small optical elements such as waveguides, diode laser, lenses, fibers, etc... More specifically, a microHexFlex with 3mm diameter footprint has been shown to have a quasi-static range of 7 x 13 x 8 μm³ and 0.9 x 0.8 x 1.4 degrees. Simulations show that the microHexFlex is capable of exerting quasi-static forces of approximately 20mN and 2.7mN along in-, and out-of-plane directions. We discuss how the dynamic performance and resolution of the microHexFlex have been augmented using Input Shaping^TM and HyperBit control respectively. This enables the microHexFlex to rapidly and accurately control position within 10 nm when operating at 100 Hz. The microHexFlex may be manufactured using deep reactive ion etching (DRIE) at a cost of less than $2 dollars per device.

Citation Download Citation

Shih-Chi Chen, Martin L. Culpepper, and Scott Jordan "Six-axis compliant mechanisms for manipulation of micro-scale fiber optics components", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660P (22 January 2007); https://doi.org/10.1117/12.702140

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