Beyond measurement uncertainty: improving the productivity of metrology tools through recipe error analysis

Eric Solecky; Anas Bennasser; Erwin Weissmann

doi:10.1117/12.712850

5 April 2007 Beyond measurement uncertainty: improving the productivity of metrology tools through recipe error analysis

Eric Solecky, Anas Bennasser, Erwin Weissmann

Author Affiliations +

Proceedings Volume 6518, Metrology, Inspection, and Process Control for Microlithography XXI; 65181J (2007) https://doi.org/10.1117/12.712850
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

A key responsibility of a metrology engineer is to reduce measurement uncertainty. While important, decreasing measurement uncertainty is only one of many tasks the metrology engineer needs to address. A broader view includes continually improving the productivity of the metrology toolset. This requires the appropriate skills, methods and analysis tools to identify and address the key issues efficiently. Often, limitations in recipe build experience, inadequate calibrations and monitoring of the fleet and toolset limitations, cause many productivity issues that directly affect the cycle-time, toolset throughput, and the efficient use of engineering resources. This paper explores the analysis tools needed to improve productivity by analyzing metrology toolset recipe errors. Examples of methods and an application developed and used by IBM will be shown along with how they have lead to improved productivity of the fleet. Further, a discussion is included catered towards standardizing the critical information needed from suppliers for building universal analysis tools to allow improvements in productivity.

Citation Download Citation

Eric Solecky, Anas Bennasser, and Erwin Weissmann "Beyond measurement uncertainty: improving the productivity of metrology tools through recipe error analysis", Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65181J (5 April 2007); https://doi.org/10.1117/12.712850

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