Piezoresistive in-line integrated force sensors for on-chip measurement and control

Kendall Teichert; Tyler Waterfall; Brian Jensen; Larry Howell; Tim McLain

doi:10.1117/12.716234

10 April 2007 Piezoresistive in-line integrated force sensors for on-chip measurement and control

Kendall Teichert, Tyler Waterfall, Brian Jensen, Larry Howell, Tim McLain

Proceedings Volume 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007; 65292E (2007) https://doi.org/10.1117/12.716234
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2007, San Diego, California, United States

Abstract

This paper presents the design, fabrication, and testing of a force sensor for integrated use with thermomechanical in-plane microactuators. The force sensor is designed to be integrated with the actuator and fabricated in the same batch fabrication process. This sensor uses the piezoresistive property of silicon as a sensing signal by directing the actuation force through two thin legs, producing a tensile stress. This tensile load produces a resistance change in the thin legs by the piezoresistive effect. The resistance change is linearly correlated with the applied force. The device presented was designed by considering both its piezoresistive sensitivity and out-of- plane torsional stability. A design trade-off exists between these two objectives in that longer legs are more sensitive yet less stable. Fabrication of the sensor design was done using the MUMPs process. This paper presents experimental results from this device and a basic model for comparison with previously attained piezoresistive data. The results validate the concept of integral sensing using the piezoresistive property of silicon.

Citation Download Citation

Kendall Teichert, Tyler Waterfall, Brian Jensen, Larry Howell, and Tim McLain "Piezoresistive in-line integrated force sensors for on-chip measurement and control", Proc. SPIE 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, 65292E (10 April 2007); https://doi.org/10.1117/12.716234

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