Ultra-low dark current InGaAs technology for focal plane arrays for low-light level visible-shortwave infrared imaging

Bora M. Onat; Wei Huang; Navneet Masaun; Michael Lange; Martin H. Ettenberg; Christopher Dries

doi:10.1117/12.720522

15 May 2007 Ultra-low dark current InGaAs technology for focal plane arrays for low-light level visible-shortwave infrared imaging

Bora M. Onat, Wei Huang, Navneet Masaun, Michael Lange, Martin H. Ettenberg, Christopher Dries

Author Affiliations +

Proceedings Volume 6542, Infrared Technology and Applications XXXIII; 65420L (2007) https://doi.org/10.1117/12.720522
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

Under the DARPA Photon Counting Arrays (PCAR) program we have investigated technologies to reduce the overall noise level in InGaAs based imagers for identifying a man at 100m under low-light level imaging conditions. We report the results of our experiments comprising of 15 InGaAs wafers that were utilized to investigate lowering dark current in photodiode arrays. As a result of these experiments, we have achieved an ultra low dark current of 2nA/cm² through technological advances in InGaAs detector design, epitaxial growth, and processing at a temperature of +12.3°C. The InGaAs photodiode array was hybridized to a low noise readout integrated circuit, also developed under this program. The focal plane array (FPA) achieves very high sensitivity in the shortwave infrared bands in addition to the visible response added via substrate removal process post hybridization. Based on our current room-temperature stabilized SWIR camera platform, these imagers enable a full day-night imaging capability and are responsive to currently fielded covert laser designators, illuminators, and rangefinders. In addition, improved haze penetration in the SWIR compared to the visible provides enhanced clarity in the imagery of a scene. In this paper we show the results of our dark current studies as well as FPA characterization of the camera built under this program.

Citation Download Citation

Bora M. Onat, Wei Huang, Navneet Masaun, Michael Lange, Martin H. Ettenberg, and Christopher Dries "Ultra-low dark current InGaAs technology for focal plane arrays for low-light level visible-shortwave infrared imaging", Proc. SPIE 6542, Infrared Technology and Applications XXXIII, 65420L (15 May 2007); https://doi.org/10.1117/12.720522

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