An optical microsystem based on vertical silicon-air Bragg mirror for liquid substances monitoring

Luca De Stefano; Ivo Rendina; Ilaria Rea; Lucia Rotiroti; Edoardo De Tommasi; Giuseppe Barillaro

doi:10.1117/12.722376

16 May 2007 An optical microsystem based on vertical silicon-air Bragg mirror for liquid substances monitoring

Luca De Stefano, Ivo Rendina, Ilaria Rea, Lucia Rotiroti, Edoardo De Tommasi, Giuseppe Barillaro

Proceedings Volume 6585, Optical Sensing Technology and Applications; 65850N (2007) https://doi.org/10.1117/12.722376
Event: International Congress on Optics and Optoelectronics, 2007, Prague, Czech Republic

Abstract

In this work, an integrated optical microsystems for the continuous detection of flammable liquids has been fabricated and characterized. The proposed system is composed of a the transducer element, which is a vertical silicon/air Bragg mirror fabricated by silicon electrochemical micromachining, sealed with a cover glass anodically bonded on its top. The device has been optically characterized in presence of liquid substances of environmental interest, such as ethanol and isopropanol. The preliminary experimental results are in good agreement with the theoretical calculations and show the possibility to use the device as an optical sensor based on the change of its reflectivity spectrum.

Citation Download Citation

Luca De Stefano, Ivo Rendina, Ilaria Rea, Lucia Rotiroti, Edoardo De Tommasi, and Giuseppe Barillaro "An optical microsystem based on vertical silicon-air Bragg mirror for liquid substances monitoring", Proc. SPIE 6585, Optical Sensing Technology and Applications, 65850N (16 May 2007); https://doi.org/10.1117/12.722376

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