Response of inorganic materials to laser-plasma EUV radiation focused with a lobster eye collector

Andrzej Bartnik; Henryk Fiedorowicz; Roman Jarocki; Jerzy Kostecki; Miroslaw Szczurek; Radka Havlikova; Ladislav Pína; Libor Švéda; Adolf Inneman

doi:10.1117/12.722749

11 May 2007 Response of inorganic materials to laser-plasma EUV radiation focused with a lobster eye collector

Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Miroslaw Szczurek, Radka Havlikova, Ladislav Pína, Libor Švéda, Adolf Inneman

Author Affiliations +

Proceedings Volume 6586, Damage to VUV, EUV, and X-ray Optics; 65860A (2007) https://doi.org/10.1117/12.722749
Event: International Congress on Optics and Optoelectronics, 2007, Prague, Czech Republic

Abstract

A single photon of EUV radiation carries enough energy to break any chemical bond or excite electrons from inner atomic shells. It means that the radiation regardless of its intensity can modify chemical structure of molecules. It is the reason that the radiation even with low intensity can cause fragmentation of long chains of organic materials and desorption of small parts from their surface. In this work interaction of EUV radiation with inorganic materials was investigated. Different inorganic samples were irradiated with a 10 Hz laser - plasma EUV source based on a gas puff target. The radiation was focused on a sample surface using a lobster eye collector. Radiation fluence at the surface reached 30 mJ/cm² within a wavelength range 7 - 20 nm. In most cases there was no surface damage even after several minutes of irradiation. In some cases there could be noticed discolouration of an irradiated surface or evidences of thermal effects. In most cases however luminescent and scattered radiation was observed. The luminescent radiation was emitted in different wavelength ranges. It was recorded in a visible range of radiation and also in a wide wavelength range including UV, VUV and EUV. The radiation was especially intense in a case of non-metallic chemical compounds.

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Andrzej Bartnik, Henryk Fiedorowicz, Roman Jarocki, Jerzy Kostecki, Miroslaw Szczurek, Radka Havlikova, Ladislav Pína, Libor Švéda, and Adolf Inneman "Response of inorganic materials to laser-plasma EUV radiation focused with a lobster eye collector", Proc. SPIE 6586, Damage to VUV, EUV, and X-ray Optics, 65860A (11 May 2007); https://doi.org/10.1117/12.722749

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