RIB waveguides fabricated by sol-gel method

Paweł Karasiński; Roman Rogoziński

doi:10.1117/12.739561

9 April 2007 RIB waveguides fabricated by sol-gel method

Paweł Karasiński, Roman Rogoziński

Proceedings Volume 6608, Lightguides and Their Applications III; 66080V (2007) https://doi.org/10.1117/12.739561
Event: Lightguides and Their Applications III, 2006, Krasnobród, Poland

Abstract

RIB waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO₂:TiO₂ which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO₂:TiO₂ was carried out in water solutions of ammonia fluoride. The paper presents the determined technological characteristics, power distributions in the obtained strip waveguides and the results of theoretical analysis.

Citation Download Citation

Paweł Karasiński and Roman Rogoziński "RIB waveguides fabricated by sol-gel method", Proc. SPIE 6608, Lightguides and Their Applications III, 66080V (9 April 2007); https://doi.org/10.1117/12.739561

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