Calibration and topographic and profilometric methods using the prism normal measurement

Tomáš Rössler; Michal Pochmon; Dušan Mandát; Miroslav Hrabovský; Jana Matušová

doi:10.1117/12.739533

12 April 2007 Calibration and topographic and profilometric methods using the prism normal measurement

Tomáš Rössler, Michal Pochmon, Dušan Mandát, Miroslav Hrabovský, Jana Matušová

Proceedings Volume 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics; 66090V (2007) https://doi.org/10.1117/12.739533
Event: 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 2006, Liberec, Czech Republic

Abstract

The presented paper is dealt with the calibration of methods of the optical 3D measurement of the shape of objects. Methods can be divided into the two groups: topographic and profilometric methods. The topography is a method giving a contour map as result. On the other hand, the result of the profilometry is the data file containing the topographic depth (z-axis value) in the regular or irregular network of points (they are given by the x-axis and y-axis values). Every method needs the calibration of these values that means the relation between measured and resulting quantity. The x-axis and y-axis values are obtained as pixel distances from the record of optical image by the CCD camera. The z-values are computed by various ways in dependence of the calibrated method character. It can be the fringe orders, pixel distances again, phase differences or others. The paper describes the procedure of determination of calibration constants. It is based on the known object measurement by the calibrated method and the following evaluation of results.

Citation Download Citation

Tomáš Rössler, Michal Pochmon, Dušan Mandát, Miroslav Hrabovský, and Jana Matušová "Calibration and topographic and profilometric methods using the prism normal measurement", Proc. SPIE 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 66090V (12 April 2007); https://doi.org/10.1117/12.739533

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