Special lenslet array with long focal length range for Shack-Hartmann Wavefront Sensor

L. P. Zhao; N. Bai; X. Li; Z. P. Fang; A. A. Hein; Z. W. Zhong

doi:10.1117/12.726043

18 June 2007 Special lenslet array with long focal length range for Shack-Hartmann Wavefront Sensor

L. P. Zhao, N. Bai, X. Li, Z. P. Fang, A. A. Hein, Z. W. Zhong

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66161O (2007) https://doi.org/10.1117/12.726043
Event: Optical Metrology, 2007, Munich, Germany

Abstract

Since its emergence in the early 1970s, Shack-Hartmann Wavefront Sensing technology has been investigated and explored world-widely by the researchers and engineers. However, there are few papers or reports to study the system performance and key factors to affect the performance of a Shack-Hartmann Wavefront Sensor (SHWS), in this paper, through experimental study of the system stability of a SHWS, it is found that the image sensor and detector, normally a CCD, should be placed exactly at the focal plane of the lenslet array, otherwise it will bring in significant wavefront measurement error. In order to improve the system performance, a special lenslet array with long focal range is designed, and it is functioned by a spatial light modulator for sampling wavefront in a SHWS. Diffractive lenses with long focal length range can provide pseudo-nondiffracting beams, and a long range of focusing plane. The performances and effects of the modified SHWS with such a special lenslet array generated by a programmable SLM, are investigated, and the experimental results show that the system stability and measurement repeatability are not sensitive to the sensing distance, and can keep at a good level in a long range.

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L. P. Zhao, N. Bai, X. Li, Z. P. Fang, A. A. Hein, and Z. W. Zhong "Special lenslet array with long focal length range for Shack-Hartmann Wavefront Sensor", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66161O (18 June 2007); https://doi.org/10.1117/12.726043

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KEYWORDS

Wavefront sensors

Sensing systems

Charge-coupled devices

Spatial light modulators

CCD image sensors

Image sensors

Sensors

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