Paper
2 July 2007 Fabrication and metrology of micro- and nano-optics
Author Affiliations +
Proceedings Volume 6619, Third European Workshop on Optical Fibre Sensors; 66190E (2007) https://doi.org/10.1117/12.738350
Event: Third European Workshop on Optical Fibre Sensors, 2007, Napoli, Italy
Abstract
Large scale manufacturing of nano and micro-optics, both free-space and planar waveguide optics, has many technical challenges. Supporting technologies required for manufacturing of different types of optical devices and modules in nano and micro scales are being developed. As fabrication technology to support nano and micro optics improves, challenges associated with metrology of optical feature in nano and micro scales become more apparent. In this paper some examples of research projects at the University of North Carolina at Charlotte in these areas are presented.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Faramarz Farahi "Fabrication and metrology of micro- and nano-optics", Proc. SPIE 6619, Third European Workshop on Optical Fibre Sensors, 66190E (2 July 2007); https://doi.org/10.1117/12.738350
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KEYWORDS
Optics manufacturing

Micro optics

Metrology

Free space optics

Electron beam lithography

Optical spheres

Sensors

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