Annular sub-aperture stitching interferometry for testing of large aspherical surfaces

Xiao-kun Wang; Li-hui Wang; Li-gong Zheng; Wei-jie Deng; Xue-jun Zhang

doi:10.1117/12.791061

12 March 2008 Annular sub-aperture stitching interferometry for testing of large aspherical surfaces

Xiao-kun Wang, Li-hui Wang, Li-gong Zheng, Wei-jie Deng, Xue-jun Zhang

Proceedings Volume 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing; 66240A (2008) https://doi.org/10.1117/12.791061
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

Annular subaperture stitching interferometric technology can test large-aperture, high numerical aperture aspheric surfaces with high resolution, low cost and high efficiency without auxiliary null optics. In this paper, the basic principle and theory of the stitching method are introduced, the reasonable mathematical model and effective splicing algorithm are established based on simultaneous least-squares method and Zernike polynomial fitting. The translation errors are eliminated from each subaperture through the synthetical optimization stitching mode, it keeps the error from transmitting and accumulating. The numerical simulations have been carried on by this method. As results, the surface map of the full aperture after stitching is consistent to the input surface map, the difference of PV error and RMS error between them is -0.0074 λ and -0.00052 λ (λ is 632.8nm), respectively; the relative error of PV and RMS is -0.53% and -0.31%; and the PV and RMS of residual error of the full aperture phase distribution is 0.027 λ and 0.0023 λ, respectively. The results conclude that this splicing model and algorithm are accurate and feasible. So it provides another quantitive measurement for test aspheric surfaces especially for large aperture aspheres besides null-compensation.

Citation Download Citation

Xiao-kun Wang, Li-hui Wang, Li-gong Zheng, Wei-jie Deng, and Xue-jun Zhang "Annular sub-aperture stitching interferometry for testing of large aspherical surfaces", Proc. SPIE 6624, International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing, 66240A (12 March 2008); https://doi.org/10.1117/12.791061

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