Actuators with 10 mm stroke and less than 300 nm of runout

Alson E. Hatheway

doi:10.1117/12.740030

17 September 2007 Actuators with 10 mm stroke and less than 300 nm of runout

Alson E. Hatheway

Proceedings Volume 6665, New Developments in Optomechanics; 66650S (2007) https://doi.org/10.1117/12.740030
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

All-elastic motorized flexure stages have been developed for critical metrology applications where X-Y runout of the motion must be less than 300 nm over a 10 mm stroke. The design was adapted from a highly stable flat-blade flexure stage that was manually driven and used in several instruments where long term stability of adjustments were important. The adaptations included a motor-driven miniature ball screw, a Z axis position sensor repeatable to 10 microns and elastic strain relief between the ball nut and the driven table. In-situ testing of the actuators demonstrated that they met or exceeded all specifications for their performance.

Citation Download Citation

Alson E. Hatheway "Actuators with 10 mm stroke and less than 300 nm of runout", Proc. SPIE 6665, New Developments in Optomechanics, 66650S (17 September 2007); https://doi.org/10.1117/12.740030

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