Fabrication and testing of large flats

Julius Yellowhair; Peng Su; Matt Novak; Jim Burge

doi:10.1117/12.736775

14 September 2007 Fabrication and testing of large flats

Julius Yellowhair, Peng Su, Matt Novak, Jim Burge

Proceedings Volume 6671, Optical Manufacturing and Testing VII; 667107 (2007) https://doi.org/10.1117/12.736775
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Flat mirrors of around 1 meter are efficiently manufactured with large plano polishers and measured with Fizeau interferometry. We have developed technologies and hardware that allow fabrication and testing of flat mirrors that are much larger. The grinding and polishing of the large surfaces uses conventional laps driven under computer control for accurate and systematic control of the surface figure. The measurements are provided by a combination of a scanning pentaprism test, capable of measuring power and low order irregularity over diameters up to 8 meters, and subaperture Fizeau interferometry. We have developed a vibration insensitive Fizeau interferometer with 1 meter aperture and software to optimally combine the data from the subaperture tests. These methods were proven on a 1.6 m flat mirror that was finished to 6 nm rms irregularity and 11 nm rms power.

Citation Download Citation

Julius Yellowhair, Peng Su, Matt Novak, and Jim Burge "Fabrication and testing of large flats", Proc. SPIE 6671, Optical Manufacturing and Testing VII, 667107 (14 September 2007); https://doi.org/10.1117/12.736775

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