Characterization of hydrogenated amorphous silicon thin films prepared by PECVD

Zhi-Ming Wu; Shi-Bin Li; Wei Li; Nai-Man Niao; Ya-Dong Jiang; Kui-Peng Zhu

doi:10.1117/12.783345

14 November 2007 Characterization of hydrogenated amorphous silicon thin films prepared by PECVD

Zhi-Ming Wu, Shi-Bin Li, Wei Li, Nai-Man Niao, Ya-Dong Jiang, Kui-Peng Zhu

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67222X (2007) https://doi.org/10.1117/12.783345
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Amorphous silicon (a-Si:H) films are prepared on K9 glass substrate by plasma enhanced chemical vapor deposition (PECVD) and the substrate temperature varies from 150 to 300 °C. The gas phase processes of pure SiH₄ in PECVD system were discussed. The change of grain size and morphology was characterized by atomic force microscope morphology (AFM). The influence of substrate temperature on the growth rate and the optical band gap of Si:H film were measured by spectra ellipsometer (SE). Scanning electron microscopy (SEM) was used to make sure the measurement of film thickness by SE.

Citation Download Citation

Zhi-Ming Wu, Shi-Bin Li, Wei Li, Nai-Man Niao, Ya-Dong Jiang, and Kui-Peng Zhu "Characterization of hydrogenated amorphous silicon thin films prepared by PECVD", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67222X (14 November 2007); https://doi.org/10.1117/12.783345

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available