Primary study on ellipsometry of large roughness surface

Zuohua Huang; Lijuan Wang; Zhenjiang He; Junfang Chen

doi:10.1117/12.783562

17 January 2008 Primary study on ellipsometry of large roughness surface

Zuohua Huang, Lijuan Wang, Zhenjiang He, Junfang Chen

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67233U (2008) https://doi.org/10.1117/12.783562
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Based on the method of space filtering, a subassembly of space filter consisting of lens and filter is introduced and a conventional null ellipsometer has been improved to measure large roughness surface and film with large roughness interface. From theory, the possibility of using space filter in null ellipsometer to get ellipsometric parameters of large roughness surfaces corresponding to the smooth surface is analyzed, and primary experiment is carried out. Experiment results show that the improved null ellipsometer can obtain preferable repeatability and accuracy of optical parameters of large roughness surface and film with large roughness interface.

Citation Download Citation

Zuohua Huang, Lijuan Wang, Zhenjiang He, and Junfang Chen "Primary study on ellipsometry of large roughness surface", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67233U (17 January 2008); https://doi.org/10.1117/12.783562

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