New gas sensor head without gas chamber by hollow core PBF

Xuewu Zhou; Jianping Hou; Jianlin Zhao

doi:10.1117/12.782462

19 November 2007 New gas sensor head without gas chamber by hollow core PBF

Xuewu Zhou, Jianping Hou, Jianlin Zhao

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 672407 (2007) https://doi.org/10.1117/12.782462
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A reflecting optical-fiber gas sensor head structure without gas chamber by PBF was reported. It could be used in real-time detection of gas concentration in micro-machinery. For this sensor head, a PBF fiber was used for both transmitting and sensing, a micro-concave mirror and a gas filter were fixed to the one end of the PBF, and the other end of the PBF was connected to a special open coupler in a vacuum box. Gas could transmit and fill the full hollow core area of the PBF by means of negative pressure. The characteristic of gas transmitting in the PBF was simulated with a simplified model by choosing appropriate type and parameters of the PBF. The mass flow rate, the average period of transmission and the relation between the length of PBF and the average period of transmission in different negative pressure were worked out. The result shows that the average period of transmission was proportional to the square of the length of PBF. This PBF gas sensor has its own superiority: (1)Gas transmitting is driven by negative pressure of vacuum pump in the hollow core of the PBF, then the sensor's response time can be improved to less than 10 seconds. (2)With smaller size of sensor head, the interference of the sensor's entrance can be reduced. (3)Without gas chamber, the sensor like a probe, so it can be used in more areas, especially for MEMS system.

Citation Download Citation

Xuewu Zhou, Jianping Hou, and Jianlin Zhao "New gas sensor head without gas chamber by hollow core PBF", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 672407 (19 November 2007); https://doi.org/10.1117/12.782462

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